References to silicon carbide heating components exist within the early 20th century when they were made by Acheson's Carborundum Co. during the U.S. and EKL in Berlin. Silicon carbide available improved functioning temperatures in contrast with metallic heaters. CMP of single-crystal SiC was to start with noted by Zhou [22] https://www.quora.com/profile/Trevor-Flatcher-2/Advantages-and-Challenges-of-Silicon-Carbide-Specialty-Ceramics-Macrocosm-Materials-Company-Overview-Founded-in-2016